Entegris to Invest $700 Million in US Expansion, Including Illinois Tech Center

08/21/2025 – 02:05 PM

Entegris Doubles Down on U.S. Semiconductor R&D, Bringing Investment to $1.4 Billion

BILLERICA, Mass.–(BUSINESS WIRE)– Entegris, Inc. (Nasdaq: ENTG), a key player in advanced materials science, is boosting its commitment to domestic semiconductor innovation with a planned $700 million investment in R&D over the coming years. The move, unveiled in conjunction with the Trump Administration, underscores the growing emphasis on bolstering the U.S. semiconductor ecosystem.

This significant capital injection will be channeled into R&D projects across Entegris’ Materials Solutions and Advanced Purity Solutions divisions. A portion of the investment will transform its Aurora, Illinois site into a cutting-edge U.S. Technology Center. Strategically positioned amidst the burgeoning semiconductor hubs of New York, Ohio, Arizona, and Texas, the Aurora facility will serve as a linchpin in Entegris’ solutions-oriented strategy, focused on maximizing product performance and accelerating time-to-market for its comprehensive suite of offerings – from deposition materials and slurries to cleans and CMP pads.

This U.S. expansion leverages a robust domestic talent pool and reinforces Entegris’ dedication to supporting advanced semiconductor manufacturing and driving technological leadership. It also builds upon a prior pledge of $700 million for the development of a state-of-the-art manufacturing center of excellence in Colorado Springs, CO.

“To support the industry’s growth, we have been creating a stronger and more resilient domestic semiconductor ecosystem in the U.S.,” said Entegris president and CEO Dave Reeder. “These investments also allow for continued leadership in advanced materials solutions.”

As the semiconductor landscape in the U.S. continues to evolve, the demand for domestic capacity and collaborative innovation is set to surge. This growth presents significant opportunities for semiconductor materials suppliers like Entegris to meet both current and future industry requirements.

About Entegris

Entegris is a leading supplier of advanced materials and process solutions for the semiconductor and other high-tech industries. Entegris has approximately 8,200 employees throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service and/or research facilities in the United States, Canada, China, Germany, Israel, Japan, Malaysia, Singapore, South Korea, and Taiwan. Additional information can be found at www.entegris.com.

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Source: Entegris, Inc.